MICRO-ELECTROMECHANICAL DEVICE COMPRISING A MOBILE MASS THAT CAN MOVE OUT-OF-PLANE

摘要

The invention relates to a micro-electromechanical device used as a force sensor, comprising a mobile mass connected to at least one securing zone by means of springs or deformable elements, and means for detecting the movement of the mobile mass, the mobile mass having an outer frame and an inner body, the outer frame and the inner body being connected by at least two flexible portions forming integral decoupling springs on two separate sides of the outer frame.

主权项

1. A micro-electromechanical device formed from a semiconductor substrate having its layers defining planes along axes x and y, the axis perpendicular to the layers defining an axis z, said device comprising:
at least one anchoring area which is fixed with respect to the substrate, and at least one mobile mass, capable of displacing out of the substrate plane along axis z by rotation around a swivel axis directed along axis x, and at least one deformable element, said deformable element connecting the mobile mass to the anchoring area, at least one means for detecting the displacement of the mobile mass, wherein the mobile mass has a first portion forming a support structure and a second portion forming the main body of the mobile mass, said first portion being connected to the anchoring area by the deformable element, said first and second portions being connected by at least two flexible portions forming decoupling springs fastened to two different sides of said first portion and in that it comprises at least one area of cooperation between the second portion and the substrate, forming a stop limiting the displacement of the second portion of the mobile mass relative to the anchoring area.