SYSTEM AND METHOD FOR ANALYZING A GAS

摘要

A gas analysis system includes a fluidic channel for flow of a gas to be analyzed, a detector in the channel and adapted for measuring interactions of the gas with the detector, the detector including a resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, a detection device adapted for providing an output electric signal representative of the vibrations of the resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of the detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from the changes a fluidic characteristic of the gas.

主权项

1. A gas analysis system comprising:
a fluidic channel intended for the flow of a gas to be analyzed, at least one detector laid out in said fluidic channel and adapted for measuring interactions of the gas with said detector, said detector comprising at least one resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating at least a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, and a detection device adapted for providing an output electric signal representative of the vibrations of said resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of said at least one detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from said changes at least one fluidic characteristic of said gas.