发明名称 SEMICONDUCTOR DEVICE, DISPLAY DEVICE HAVING SEMICONDUCTOR DEVICE, DISPLAY MODULE HAVING DISPLAY DEVICE, AND ELECTRONIC EQUIPMENT HAVING SEMICONDUCTOR DEVICE, DISPLAY DEVICE AND DISPLAY MODULE
摘要 PROBLEM TO BE SOLVED: To suppress variation in electric characteristics of a semiconductor device having a transistor having an oxide semiconductor, and improve its reliability.SOLUTION: In a semiconductor device having a transistor, the transistor is provided on a first insulation film, the transistor has an oxide semiconductor film on the first insulation film; a gate insulation film on the oxide semiconductor film; a gate electrode on a gate insulation film; a second insulation film on the oxide semiconductor film and the gate electrode; and a source electrode and a drain electrode electrically connected to the oxide semiconductor film, the first insulation film contains oxygen, the second insulation film contains hydrogen, the oxide semiconductor film has a first region contacting with the gate insulation film and a second region contacting with the second insulation film, the first insulation film has a third region overlapped with the first region and a fourth region overlapped with the second region, and a concentration of the impurity element of the fourth region is higher that of the third region.
申请公布号 JP2015188080(A) 申请公布日期 2015.10.29
申请号 JP20150048994 申请日期 2015.03.12
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;HIZUKA JUNICHI;SHIMA YUKINORI;KAMINAGA MASAMI;KUROSAKI DAISUKE;NAKATA MASATAKA
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L21/336;H01L51/50;H05B33/14 主分类号 H01L29/786
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