发明名称 |
SEMICONDUCTOR DEVICE, DISPLAY DEVICE HAVING SEMICONDUCTOR DEVICE, DISPLAY MODULE HAVING DISPLAY DEVICE, AND ELECTRONIC EQUIPMENT HAVING SEMICONDUCTOR DEVICE, DISPLAY DEVICE AND DISPLAY MODULE |
摘要 |
PROBLEM TO BE SOLVED: To suppress variation in electric characteristics of a semiconductor device having a transistor having an oxide semiconductor, and improve its reliability.SOLUTION: In a semiconductor device having a transistor, the transistor is provided on a first insulation film, the transistor has an oxide semiconductor film on the first insulation film; a gate insulation film on the oxide semiconductor film; a gate electrode on a gate insulation film; a second insulation film on the oxide semiconductor film and the gate electrode; and a source electrode and a drain electrode electrically connected to the oxide semiconductor film, the first insulation film contains oxygen, the second insulation film contains hydrogen, the oxide semiconductor film has a first region contacting with the gate insulation film and a second region contacting with the second insulation film, the first insulation film has a third region overlapped with the first region and a fourth region overlapped with the second region, and a concentration of the impurity element of the fourth region is higher that of the third region. |
申请公布号 |
JP2015188080(A) |
申请公布日期 |
2015.10.29 |
申请号 |
JP20150048994 |
申请日期 |
2015.03.12 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;HIZUKA JUNICHI;SHIMA YUKINORI;KAMINAGA MASAMI;KUROSAKI DAISUKE;NAKATA MASATAKA |
分类号 |
H01L29/786;G02F1/1368;G09F9/30;H01L21/336;H01L51/50;H05B33/14 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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