| 发明名称 |
Methods And Apparatus For MEMS Structure Release |
| 摘要 |
An apparatus may include a vessel adapted to contain an organic solvent and a dehydration apparatus coupled with the vessel. The dehydration apparatus may be adapted to remove water from the organic solvent. The apparatus may further include a water content monitor coupled to the dehydration apparatus and the vessel, in which the water content monitor is adapted to determine a water content of the organic solvent. The apparatus may further include a wafer handler adapted to transfer at least one semiconductor wafer including a MEMS device into the vessel. |
| 申请公布号 |
US2015308743(A1) |
申请公布日期 |
2015.10.29 |
| 申请号 |
US201514742101 |
申请日期 |
2015.06.17 |
| 申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Yang Tai-I;Chung Ming-Tai;Shue Hong-Seng;Lin Ming-Yi |
| 分类号 |
F26B19/00 |
主分类号 |
F26B19/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus, comprising:
a vessel adapted to contain an organic solvent; a dehydration apparatus coupled with the vessel, the dehydration apparatus adapted to remove water from the organic solvent; a water content monitor coupled to the dehydration apparatus and the vessel, the water content monitor adapted to determine a water content of the organic solvent; and a wafer handler adapted to transfer at least one semiconductor wafer including a MEMS device into the vessel. |
| 地址 |
Hsin-Chu TW |
