LIFT GUIDE ASSEMBLY

摘要

The present invention relates to a lift pin guide assembly which minimizes a friction force between a lift pin and a lift pin guide assembly to prevent damage to the lift pin. Specifically, the lift pin guide assembly according to the present invention guides a vertical movement of a lift pin which lifts a substrate supported on an upper surface of a substrate loading unit by a movement relative to the substrate loading unit, and comprises: a guide main body fixed in the substrate loading unit, and provided with a penetration unit which is disposed therein and through which the lift pin penetrates; and a low friction support unit which is disposed around the penetration unit in the guide main body, and supports a side of the lift pin. A portion or a whole of the low friction support unit is made of a self-lubricating material.