发明名称 |
COMMON-PATH 3-DIMENSION DIFFRACTION LIGHT MICROSCOPY AND METHOD FOR MEASURING DEFORMABILTY OF SAMPLE |
摘要 |
DDisclosed are a three-dimensional diffraction optical microscopy of a common optical path which can both measure three-dimensional refractivity distribution, and the film vibration of a sample. The three-dimensional diffraction optical microscopy of a common optical path comprises: a light source (101) for radiating a beam; a lens unit for changing an incident angle incident in the sample of the beam, and compensating an optical axis changed by changing the incident angle; a camera unit for measuring an interference fringe between beams transmitted the sample; and an analyzing unit for calculating three-dimensional refractivity distribution of the sample based on an interference pattern between the beams, and analyzing the film vibration of the sample. |
申请公布号 |
KR101563810(B1) |
申请公布日期 |
2015.10.28 |
申请号 |
KR20140078107 |
申请日期 |
2014.06.25 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
PARK, YONG KEUN;KIM, YOUNG CHAN |
分类号 |
G02B21/36;G01N21/17;G02B21/04 |
主分类号 |
G02B21/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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