MICRO HYBRID DIFFERENTIAL/TRIODE ION PUMP

摘要

An ion pump includes at least one electron source configured to emit electrons into the ion pump; at least one cathode positioned across the ion pump from the at least one electron source; a high-voltage grid positioned between the at least one electron source and the at least one cathode. The high-voltage grid is configured to draw the electrons in between the at least one electron source and the at least one cathode where the electrons collide with gas molecules causing the gas molecules to ionize. The at least one cathode is configured to draw ionized gas molecules toward the at least one cathode such that the ionized gas molecules are trapped by or near the at least one cathode.