发明名称 WAFER CONTAINER WITH DOOR MOUNTED SHIPPING CUSHIONS
摘要 <p>A cushioned wafer container system having removable wafer cushions for transporting large-diameter wafers. The system includes a wafer container enclosure defining a front opening and comprising a rear wall, and a plurality of wafer supports defining a plurality of slots; a front door configured to attach to the wafer enclosure at the front opening and defining a front side and a rear side; a primary wafer cushion coupled to a rear side of the front door at a central portion of the front door, the primary wafer cushion defining a plurality of wafer grooves, each of the grooves of the primary wafer cushion aligned with a slot of the wafer supports; and a first removable wafer cushion attachable to the rear side of the front door adjacent the primary wafer cushion, the first removable wafer cushion defining a plurality of wafer-receiving grooves in alignment with the grooves and slots.</p>
申请公布号 EP2845224(A4) 申请公布日期 2015.10.28
申请号 EP20130785270 申请日期 2013.05.06
申请人 ENTEGRIS, INC. 发明人 GREGERSON, BARRY
分类号 H01L21/673 主分类号 H01L21/673
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