| 摘要 |
<p>P300498WO SPEC 34 INJECTOR AND METHOD ABSTRACT Some embodiments of the present invention provide an injector for injecting a gas in a materials deposition system, the injector comprising: a gas inlet port for coupling the injector to a gas source; a distribution chamber, an intermediate chamber and a delivery manifold coupled in series to provide a flowpath for the gas between the inlet port and at least one delivery aperture through which the gas is injectable in the deposition system, the distribution chamber being arranged to allow expansion of gas entering therein, the injector having at least a first distribution chamber outlet aperture through which gas may flow from the distribution chamber to the intermediate chamber and at least first and second intermediate chamber outlet apertures through which gas may flow from the intermediate chamber to the delivery manifold, the intermediate chamber being arranged to divide a flow of gas therethrough between first and second flowpaths, the first and second intermediate chamber outlet apertures being provided in the respective flowpaths, the injector being arranged to allow the first and second flowpaths to converge within the delivery manifold.</p> |
