複合弁

摘要

The invention provides a composite valve which can achieve both an improvement of a flow rate control precision in a small flow rate region and an increase of a controllable flow rate (a reduction of a pressure loss), can securely prevent a second valve body from being undesirably opened, and can achieve a cost reduction, a downsizing, a reduction of an electric power consumption and the like. The composite valve is provided with a communication path (29) which communicates a first valve chamber (11) with a second valve chamber (21), a second valve port (23) which communicates the second valve chamber (21) with an outflow port (6), and a pilot passage (19) which communicates a back pressure chamber (16) with the outflow port (6), a first valve body (15) and a second valve body (24) are arranged so as to be moved up and down in the same direction, and are away from each other only at a predetermined distance, and the composite valve is structured such that in the case that a lift amount of the second valve body (24) for a small flow rate control is equal to or less than a predetermined amount (Tc), the pilot passage (19) is closed by a pilot valve body (20), and a first valve port (13) is closed by the first valve body (15), thereby taking a small flow rate control state in which a flow rate is controlled in correspondence to the lift amount of the second valve body (24), and in the case that the lift amount of the second valve body (24) goes beyond the predetermined amount (Tc), the pilot valve body (20) is moved up in conjunction with the upward movement of a valve shaft (25) so as to open the pilot passage (19), thereby taking a large flow rate control state in which the first valve body (15) opens the first valve port (13) on the basis of this.