发明名称 Supply of a liquid-metal target in x-ray generation
摘要 Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump (312). The pressurized liquid metal is then conducted to a nozzle (332) and ejected into a vacuum chamber (330) in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir (334), and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump (322), suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.
申请公布号 EP2743963(B8) 申请公布日期 2015.10.28
申请号 EP20140158592 申请日期 2009.04.03
申请人 EXCILLUM AB 发明人 HEMBERG, OSCAR;TUOHIMAA, TOMI;OTENDAL, MIKAEL
分类号 H01J35/08 主分类号 H01J35/08
代理机构 代理人
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