| 摘要 |
<p>The method disclosed in this specification includes: acquiring a dark-field image produced by capturing an image of a sample with a scanning transmission electron microscope by detecting electrons scattered at angles between a first angle to the optical axis of the scanning transmission electron microscope and a second angle which is larger than the first angle; acquiring a bright-field image captured simultaneously with the dark-field image by detecting electrons scattered within a third angle which is smaller than the first angle; generating a reverse image by reversing lightness and darkness of the dark-field image; and generating a difference image each of whose pixels has a brightness value equal to the difference between the brightness of the corresponding pixel in the reverse image and the brightness of the corresponding pixel in the bright-field image.</p> |
