| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sensor capable of generating an electric change by deformation of an element and capable of preventing sensitivity from being reduced with the lapse of time. <P>SOLUTION: An electrostrictive sensor (40) capable of generating an electrostatic capacitance change by deformation of an electrostrictive element includes a sensing part (30) having: a first electrostrictive element (10) composed of a first electrostrictive material layer (1) and a pair of electrodes (3a, 3b) respectively arranged on both ends of the layer (1); a second electrostrictive element (20) composed of a second electrostrictive material layer (11) and a pair of electrodes (13a, 13b) respectively arranged on both ends of the layer (11); and a base material (25) held between these electrostrictive elements. The sensing part (30) is deformed by receiving action of external force. Lead wires (5a, 5b, 15a, 15b) are connected to respective electrodes so that the electrostatic capacitance values of the first and second electrostrictive material layers (1, 11) can be measured. Each of the first and second electrostrictive material layers (1, 11) has thickness of 10μm or less and relative permittivity of 20 and more. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
