发明名称 MEMS current sensing apparatus
摘要 <p>The invention discloses an MEMS-based current sensing apparatus including: a flexible substrate joined onto an conducting wire; a sensing unit formed of an MEMS structure and disposed on the flexible substrate, the sensing unit outputting a response to a electromagnetic field induced by a current flowing in the conducting wire; and a readout circuit disposed on the flexible substrate and coupled to the sensing unit, the readout circuit monitoring the response to the electromagnetic field and calculating the amount of the current flow.</p>
申请公布号 EP2439544(B1) 申请公布日期 2015.10.28
申请号 EP20100197125 申请日期 2010.12.28
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 CHENG, SHIH-HSIEN;HO, WU-CHI;LIN, CHENG-TING;CHENG, YU-TING;LIANG, PEI-FANG;CHEN, YUNG-CHANG
分类号 G01R15/20;G01R15/14 主分类号 G01R15/20
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