发明名称 |
MEMS COMPONENT COMPRISING ALN AND SC AND METHOD FOR MANUFACTURING A MEMS COMPONENT |
摘要 |
<p>A MEMS component includes a lower electrode. The MEMS component also includes an upper electrode. The upper electrode overlies the lower electrode. The MEMS component also includes a first piezoelectric layer between the lower electrode and the upper electrode. The first piezoelectric layer has a first piezoelectric material comprising AlN and Sc.</p> |
申请公布号 |
EP2936680(A1) |
申请公布日期 |
2015.10.28 |
申请号 |
EP20120818510 |
申请日期 |
2012.12.21 |
申请人 |
EPCOS AG |
发明人 |
MOULARD, GILLES;MURALT, PAUL;MATLOUB, RAMIN |
分类号 |
H03H3/04;H03H9/02;H03H9/58 |
主分类号 |
H03H3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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