| 摘要 |
<p>The present invention realizes defect analysis inspection that employs an X-ray inspection apparatus for high-speed inspection. The processing executed by the X-ray inspection apparatus includes the steps of executing high-speed imaging (S315), creating an inspection image by executing reconstruction processing (S320), performing automatic inspection (S325), if the object has passed automatic inspection, displaying inspection results (S330), and if the object has failed automatic inspection, switching the imaging conditions and performing imaging for defect analysis (S340), creating an image by executing reconstruction processing for defect analysis (S345), and outputting the image for defect analysis (S350).</p> |
