发明名称 Optical positioning device
摘要 The device has a scanning unit that is displaceable relative to the measuring standard (1.1) in a measuring direction (X). A scanning unit (2.1) has a grating (G2) located at a scanning distance from the grating (G1). A first detector array configured to obtain a first scanning signal for position determination in which the gratings are illuminated with light of a first wavelength. A second detector array configured to obtain a second scanning signal for position determination in which the absolute mark (R1) is illuminated with light of second wavelength.
申请公布号 EP2735848(A3) 申请公布日期 2015.10.28
申请号 EP20130182830 申请日期 2013.09.03
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 HIMMEL, MARIO;WÄTZIG, JARNO;JÜNEMANN, THOMAS
分类号 G01D5/347;G01D5/26 主分类号 G01D5/347
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