发明名称 APPARATUS FOR DIRECT LASER EXPOSURE
摘要 FIELD: physics.SUBSTANCE: apparatus includes a laser radiation source, a flat and a polygonal mirror, a f? lens, a pointing mirror, a motor, an origin sensor, a panel for mounting optical elements, a base having a horizontally mounted support. The apparatus also includes a worm, eight worm gears, two frames with recesses, eight axles fitted with rollers made of elastic material, mounted in parallel rows of four each in the frame so that a uniform gap is maintained between rollers. The gap between second and third rollers in each frame is located opposite the recess in the frame, and the frames themselves are rigidly attached to the support one opposite the other, such that the rollers are arranged vertically and form touching pair surfaces for moving the workpiece to be exposed.EFFECT: simple apparatus.4 dwg
申请公布号 RU2567013(C1) 申请公布日期 2015.10.27
申请号 RU20140120073 申请日期 2014.05.19
申请人 FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "SANKT-PETERBURGSKIJ GOSUDARSTVENNYJ EHLEKTROTEKHNICHESKIJ UNIVERSITET "LEHTI" IM. V.I. UL'JANOVA (LENINA)" 发明人 SHELAVIN ANDREJ VASIL'EVICH;SAF'JANNIKOV NIKOLAJ MIKHAJLOVICH
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项
地址