Nano imprinting with reusable polymer template with metallic or oxide coating

摘要

Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.

主权项

1. An imprint lithography template comprising:
a base layer having a surface; a patterned polymer layer formed on the surface of the base layer; and a thin metal layer formed of a metal type selected from the group consisting of Gold Palladium (AuPd), Silver Palladium (AgPd), Gold (Au), Silver (Ag), Platinum (Pt) or an alloy thereof overlaying the patterned polymer layer, the metal layer having a thickness that is based on i) the type of the metal of the thin metal layer and ii) a pattern of the patterned polymer layer, the thickness being of 2 to 50 nm.