Method for plasma-treating workpieces

摘要

A method for the plasma treatment of a workpiece that includes inserting the workpiece into a plasma chamber and depositing, with the effect of a partial vacuum after plasma ignition, a coating on the workpiece by plasma treatment. Plasma ignition occurs by pulsed microwave energy, and alternating “on” phase times and “off” phase times from pulsed microwave excitation are provided by a control. During a beginning portion of the plasma treatment, a first portion of the coating is deposited. Subsequently, a quotient of the “on” phase times and the “off” phase times is increased to deposit a second portion of the coating, which has a different composition than the first portion of the coating. The quotient of the “on” phase times and the “off” phase times is then decreased to form a third portion of the coating, which has a different composition than the second portion of the coating.

主权项

1. A method for the plasma treatment of a workpiece, the method comprising the steps of:
inserting the workpiece into a plasma chamber; and depositing, with the effect of a partial vacuum after plasma ignition, a coating on the workpiece by plasma treatment; wherein plasma ignition occurs by means of pulsed microwave energy, wherein alternating “on” phase times and “off” phase times from pulsed microwave excitation are provided by a control, wherein, during a beginning portion of the plasma treatment, a first portion of the coating is deposited, wherein, subsequent to the beginning portion of the plasma treatment, a quotient of the “on” phase times and the “off” phase times is increased to deposit a second portion of the coating that has a composition that is different than the first portion of the coating, and wherein, the quotient of the “on” phase times and the “off” phase times is decreased after deposition of the second portion of the coating to form a third portion of the coating that has a composition that is different than the second portion of the coating.