Tunable interference filter, optical module, photometric analyzer, and manufacturing method of tunable interference filter

摘要

A tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflection film formed on the first substrate, a second reflection film formed on the second substrate, the second reflection film facing the first reflection film by interposing a gap, and a gap adjustable-part that adjusts the gap, wherein the second substrate has a first surface and a second surface opposed to the first surface, wherein the second substrate includes a first groove on the first surface, and wherein the second substrate includes a second groove on the second surface, the second groove facing the first groove.

主权项

1. A tunable interference filter comprising:
a first substrate; a second substrate facing the first substrate, the second substrate including a movable portion; a first reflection film formed on the first substrate; a second reflection film formed on the movable portion of the second substrate, the second reflection film facing the first reflection film by interposing a gap; and a gap adjustable-part that adjusts the gap, wherein the second substrate has a first surface and a second surface opposed to the first surface, the second reflection film being formed on the first surface, a first groove is formed on the first surface, and a second groove is formed on the second surface that faces the first groove; the first groove has a first bottom surface, a first inner side surface, and a first connection surface that is disposed between the first bottom surface and the first inner side surface; the second groove has a second bottom surface, a second inner side surface, and a second connection surface that is disposed between the second bottom surface and the second inner side surface; the first bottom surface is located entirely within the second bottom surface in a plan view; the first connection surface is located inside of the second connection surface in the plan view; and the second reflection film formed on the movable portion is surrounded by the first and second grooves in the plan view.