E-fuse with hybrid metallization

摘要

A structure including a first interconnect including a first line overlying a first via and a second interconnect including a second line overlying a second via. The first line and the second line are co-planar. The first interconnect comprises a first conductor, the first conductor comprises a metal silicide including titanium silicide, cobalt silicide, nickel silicide, tungsten silicide, platinum silicide, molybdenum silicide, tantalum silicide, or some combination thereof. The second interconnect comprises a second conductor, the second conductor comprising copper.

主权项

1. A structure comprising:
a first interconnect including a first line overlying a first via; and a second interconnect including a second line overlying a second via; wherein a top surface of the first line and a top surface of the second line are coplanar; wherein the first interconnect comprises a first conductor and a first liner, the first conductor comprises a metal silicide including titanium silicide, cobalt silicide, nickel silicide, tungsten silicide, platinum silicide, molybdenum silicide, tantalum silicide, or a combination thereof; and wherein the second interconnect comprises a second conductor and a second liner, the second conductor comprising copper, the first conductor and the second conductor are separated by both the first liner and the second liner such that a distance between the first conductor and the second conductor is equal to a wall thickness of the first liner plus a wall thickness of the second liner.