发明名称 |
Heater elements with enhanced cooling |
摘要 |
A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates. |
申请公布号 |
US9171746(B2) |
申请公布日期 |
2015.10.27 |
申请号 |
US201213602322 |
申请日期 |
2012.09.04 |
申请人 |
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发明人 |
Emami Arsalan |
分类号 |
H01L21/67;H01L23/467;F27D1/00;F27B5/08;F27D9/00 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
1. A heater insulation, comprising
a layer of insulation material, wherein the layer of insulation is configured to insulate a heater element from an outside ambient; one or more channels disposed within the layer of insulation, wherein the plurality of channels passes through along a length of the layer of insulation; a manifold coupled to the plurality of channels, wherein the manifold comprises an inlet; a restrictor assembly coupled to the plurality of channels, wherein the restrictor assembly is configured to adjustably change a flow rate of the plurality of channels; and a locking assembly coupled to the restrictor assembly, wherein the locking assembly is configured to fixedly couple the restrictor assembly to the layer of insulation. |
地址 |
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