Nano structured field effect sensor and methods of forming and using same

摘要

A solid-state field-effect transistor sensor for detecting chemical and biological species and for detecting changes in radiation is disclosed. The device includes a porous or structured channel section to improve device sensitivity. The device is operated in a fully depleted mode such that a sensed biological, chemical or radiation change causes an exponential change in channel conductance.

主权项

1. A sensor for detecting a biological, chemical, or radioactive species, the sensor comprising:
a substrate; an insulator formed overlying a portion of the substrate; and a channel formed overlying the insulator, wherein the channel surface comprises structures or pores formed therein, and wherein the sensor is configured to operate in a fully depleted mode, such that a sensed biological, chemical, or radioactive species causes an exponential change in channel conductance of the field effect sensor, wherein the channel comprises a plurality of structures and wherein a width of each of the plurality of structures is from about 10 Angstrom to 10 millimeters, and wherein the plurality of structures have different widths.