发明名称 Method for adjusting electro-optic modulator in laser device, and laser device
摘要 A laser device includes: a signal light source that outputs seed light; an electro-optic modulator that chops a portion of the seed light outputted from the signal light source and outputs signal light; an optical amplifier that amplifies the signal light outputted from the electro-optic modulator; a wavelength conversion optical element that wavelength converts the signal light amplified by the optical amplifier; a converted light detector that detects the signal light that has been wavelength converted by the wavelength conversion optical element; and an EU control unit that controls the operation of the electro-optic modulator, wherein the EU control unit is adapted, in the state in which the seed light is being outputted, to adjust bias voltage of the electro-optic modulator on the basis of the applied voltage when the intensity of the signal light after wavelength conversion detected by the converted light detector becomes substantially maximum.
申请公布号 US9172204(B2) 申请公布日期 2015.10.27
申请号 US201213981187 申请日期 2012.02.10
申请人 NIKON CORPORATION 发明人 Tokuhisa Akira;Takada Yasutoshi
分类号 H01S3/10;G02F1/37;H01S3/067;H01S3/13;H01S3/00 主分类号 H01S3/10
代理机构 Oliff PLC 代理人 Oliff PLC
主权项 1. A method for adjusting an electro-optic modulator in a laser device comprising a signal light source that outputs seed light, the electro-optic modulator that chops a portion of the seed light outputted from the signal light source and outputs signal light in pulse form, an optical amplifier that amplifies the signal light outputted from the electro-optic modulator, and a wavelength conversion optical element that wavelength converts the signal light amplified by the optical amplifier, the method comprising: detecting by a converted light detector the signal light that has been wavelength converted by the wavelength conversion optical element in the state in which the seed light is outputted in the laser device; and adjusting a bias voltage of the electro-optic modulator on the basis of when the intensity of the signal light after wavelength conversion detected by the converted light detector becomes substantially maximum in the laser device.
地址 Tokyo JP