INTEGRATED ONE-CHIP GAS SENSOR ARRAY

摘要

The present invention relates to a hybrid array gas sensor, and provides a hybrid one-chip gas sensor array which comprises: a substrate; a heater uniformly formed on an upper surface of the substrate; a heater electrode connected to the heater for operating the heater; an insulating layer which covers the heater and the heater electrode, and is formed on an upper unit of the substrate; a plurality of sensing electrodes, and sensing electrode arrays formed by being spaced at certain intervals on an upper surface of the insulating layer; and a plurality of gas detecting units individually formed on the sensing electrodes. The gas detecting units are different two or more modules selected among a group composed of an oxide thin film sensor module, a nanostructure sensor module, a thin film sensor module having a metal catalyst, and a nanostructure module having a metal catalyst.