发明名称 |
METHOD FOR PRODUCING DOOR PLATE AND DOOR PLATE PRODUCED BY THE SAME |
摘要 |
The present invention relates to a method to produce a door plate and, more specifically, relates to a method to produce a door plate used in a vacuum chamber to improve durability of a door plate and improve a sealing function. The method to produce a door plate comprises: a step of determining a flatness of one surface which comes in contact with a sealing plate; a step of anodizing a portion of a surface whose illuminance is adjusted; and a step of adjusting the illuminance of the anodized surface through a polishing process. |
申请公布号 |
KR20150118941(A) |
申请公布日期 |
2015.10.23 |
申请号 |
KR20150141184 |
申请日期 |
2015.10.07 |
申请人 |
NEW GENERATION TECHNOLOGY CO., LTD.;PARK, JONG JIN |
发明人 |
PARK, JONG JIN;BAEK, SANG CHUN |
分类号 |
H01L21/677;H01L21/02 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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