发明名称 METHOD FOR PRODUCING DOOR PLATE AND DOOR PLATE PRODUCED BY THE SAME
摘要 The present invention relates to a method to produce a door plate and, more specifically, relates to a method to produce a door plate used in a vacuum chamber to improve durability of a door plate and improve a sealing function. The method to produce a door plate comprises: a step of determining a flatness of one surface which comes in contact with a sealing plate; a step of anodizing a portion of a surface whose illuminance is adjusted; and a step of adjusting the illuminance of the anodized surface through a polishing process.
申请公布号 KR20150118941(A) 申请公布日期 2015.10.23
申请号 KR20150141184 申请日期 2015.10.07
申请人 NEW GENERATION TECHNOLOGY CO., LTD.;PARK, JONG JIN 发明人 PARK, JONG JIN;BAEK, SANG CHUN
分类号 H01L21/677;H01L21/02 主分类号 H01L21/677
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