发明名称 PHYSICAL QUANTITY SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING BODY
摘要 PROBLEM TO BE SOLVED: To provide a physical quantity sensor with high detection sensitivity, altimeter, electronic apparatus, and moving body including the physical quantity sensor.SOLUTION: A physical quantity sensor 1 includes: a flexurally deformable diaphragm 24; a flexure amount element for outputting a signal according to a flexure amount of the diaphragm 24. The flexure amount element includes center-side elements provided close to a center of the diaphragm 24, and edge-side elements provided close to the edge of the diaphragm with respect to the center-side elements.
申请公布号 JP2015184222(A) 申请公布日期 2015.10.22
申请号 JP20140062778 申请日期 2014.03.25
申请人 SEIKO EPSON CORP 发明人 TAKEUCHI JUNICHI;KINUGAWA TAKUYA
分类号 G01L9/00;H01L29/84 主分类号 G01L9/00
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