| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine particle formation apparatus which can reliably prevent an active fine particle processed in a vacuum chamber from being brought into contact with oxygen in the atmosphere when the active fine particle is taken out.SOLUTION: A fine particle formation apparatus 1 includes a vacuum chamber 2 which can be evacuated and deposits a nano-fine particle on a carrying powder under the vacuum environment in the vacuum chamber 2. The vacuum chamber 2 has multiple sealable opening parts 22a and 22b which are opened at side wall parts 21a and 21b, a ceiling part, or a bottom part, and at least a pair of gloves 60 which face a finger part inside the vacuum chamber 2 and is closely secured to the opening parts 22a and 22b. The gloves 60 are formed by a material having flexibility and airtightness. |
