摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of producing fullerene negative ions which enables, by a simple way, the increase in the amount of produced fullerene negative ions and allows the stability thereof to be kept.SOLUTION: In a method of producing a negative ions of fullerene or organic polymer, a sputtering chamber including an ionizer operable to generate thermal electrons, an extraction electrode for taking out, as a negative ion beam, negative ions of fullerene or organic polymer produced in the sputtering chamber, and a cathode rod removably attached in the sputtering chamber are used. The method comprises the steps of: heating and sublimating a sample of powder of fullerene or organic polymer which is packed in the cathode rod; depositing thermal electrons from the ionizer to the sublimated fullerene or organic polymer into negative ions; and collecting and drawing the negative ions into a beam by the extraction electrode at a positive potential.</p> |