| 发明名称 |
IMPRINT TEMPLATE AND METHODS THEREOF |
| 摘要 |
Provided herein is a method, including forming a first template including a first pattern, wherein forming the first template includes self-assembly of diblock copolymers guided by an initial pattern; forming a second template including a second pattern, wherein the second pattern corresponds to a servo pattern; and forming a master template from the first template, wherein the master template includes one or more portions of the first pattern combined with the second pattern. |
| 申请公布号 |
US2015302881(A1) |
申请公布日期 |
2015.10.22 |
| 申请号 |
US201514699412 |
申请日期 |
2015.04.29 |
| 申请人 |
Seagate Technology LLC |
发明人 |
Chauhan Sundeep;Kantorov Alexander;Lee Kim Yang;Kuo David;Marinus Van de Veerdonk Rene Johannes;Vikaramaditya Barmeshwar |
| 分类号 |
G11B5/86;G11B5/855;G11B5/596;G03F7/004;G11B11/03 |
主分类号 |
G11B5/86 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method, comprising:
forming an initial template comprising an initial pattern; forming a first template from the initial template,
wherein the first template comprises a first pattern having a greater pattern density than the initial pattern; forming a second template comprising a second pattern corresponding to a servo pattern for a recording medium; and forming a master template from the first template,
wherein the master template comprises one or more portions of the first pattern combined with the second pattern. |
| 地址 |
Cupertino CA US |
