| 主权项 |
1. An optimization device that optimizes a process procedure for each of a plurality of process machines in a substrate process system which includes the plurality of process machines, each of the plurality of processing machines has a pair of substrate transportation devices for transporting circuit substrates on two paths and are arranged in a row, and in which the circuit substrates are transported on the two paths from an upstream process machine to a downstream process machine among the plurality of process machines, the device comprising:
first process setting means for setting a process procedure for each of the plurality of process machines so as to optimize a total process time that is the sum of a process time for each of the plurality of process machines for a circuit substrate being transported on one of the two paths, and a process time for each of the plurality of process machines for a circuit substrate being transported on an other of the two paths; second process setting means for setting a process procedure for each of the plurality of process machines so as to optimize the process time for each of the plurality of process machines for a circuit substrate being transported on one of the two paths, and to optimize the process time for each of the plurality of process machines for a circuit substrate being transported on the other of the two paths; and procedure selecting means for selecting one of a first process procedure and a second process procedure based on the number of circuit substrates planned for production in the substrate process system, the first process procedure being a process procedure that is set for each of the plurality of process machines by the first process setting means, and the second process procedure being a process procedure that is set for each of the plurality of process machines by the second process setting means. |
