| 摘要 |
A problem with conventional prismatic polarized beam splitters and glass polarizing elements is that contrast is insufficient with regard to measurement with good precision. Another problem in the glass polarizing elements is that flatness is impaired by applying a coating such as an anti-reflection film, and that the measurement is made inaccurate by wavefront aberration arising therefrom. Another problem is optical element damage from a laser, etc., commensurate with increased output of a light source. The present invention allows improved contrast and alleviated wavefront aberration by being a cube-shaped polarized beam splitter module of a structure having a flat plate polarizing element sandwiched between oblique planes of two right-angled prisms which are combined to form a cube, and with a polarized splitter film formed upon at least one surface of the flat plate polarizing element. |
