发明名称 COATING METHOD USED FOR NANO SURFACE COATING OF IRREGULARLY-SHAPED METAL
摘要 The present invention provides a coating method for use in nano surface coating of irregularly-shaped metal, comprising: 1) placing the irregularly-shaped metal into a vacuum cavity; introducing, into the vacuum cavity,organometallic compound steam which is made to generate physical or chemical adsorption with a surface; feeding nitrogen gas to remove an excess organometallic compound; feeding water vapor or ozone into the vacuum; feeding the nitrogen gas to remove excess unreacted water vapor, thus constituting a cycle and forming an atomic layer of an oxide film on the metal surface; 2) repeating the cycle 50 times so that atomic layers of an oxide film are stacked layer by layer to form a dense 5nm oxide film layer; and 3) coating a surface of the oxide film layer using oxygen-based silane fluorocarbon, then baking same at 60-150ºC to coat and generate an anti-fingerprint fluorinated film layer. The thickness of the coating in the present invention is only 10 nanometers, which does not affect product appearance, has high hardness and good resistance to pollution, acid, alkali and abrasion, and is durable.
申请公布号 WO2015157880(A1) 申请公布日期 2015.10.22
申请号 WO2014CN00863 申请日期 2014.09.23
申请人 FU, YU 发明人 FU, YU
分类号 C23C16/00;B05D3/02;C23C16/40 主分类号 C23C16/00
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