发明名称 IMAGE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor light receiving element whose contribution (crosstalk between pixels) to neighboring photodiodes is suppressed due to lateral diffusion of carriers generated in a depth position of a Si substrate.SOLUTION: Disclosed is a semiconductor light receiving element including: a first conductive type semiconductor substrate; and a second conductive type semiconductor area constituting a photodiode by junction with the semiconductor substrate. A plurality of photodiodes are arranged in an array form, a modified area caused by laser irradiation is provided between neighboring photodiodes and a depth of the modified area is arbitrarily set by the wavelength of incident light.
申请公布号 JP2015185730(A) 申请公布日期 2015.10.22
申请号 JP20140061696 申请日期 2014.03.25
申请人 SEIKO INSTRUMENTS INC 发明人 KOYAMA AKIRA
分类号 H01L27/146;H01L21/322;H01L31/10 主分类号 H01L27/146
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