FLOW CONTROL DEVICE, ELECTRONIC APPARATUS, FLOW CONTROL METHOD, AND FLOW CONTROL PROGRAM
摘要
<p>PROBLEM TO BE SOLVED: To provide a flow control device capable of changing fluid flow while maintaining reliability.SOLUTION: The flow control device includes: first flow generating means that makes a fluid flow at a first flow rate in a first direction; second flow generating means that makes a fluid flow at a second flow rate in a second direction; and control means that controls the first flow generating means and the second flow generating means so that each of the first flow rate and the second flow rate is accompanied by a phase difference.</p>
