Expanded Canonical Forms Of Layout Patterns

摘要

Aspects of the disclosed technology relate to techniques for determining expanded canonical forms of layout patterns. Coordinates of vertices of geometric elements in a window of a layout design are first transformed into new coordinates of the vertices, wherein the coordinates of vertices do not comprise clipped coordinates and the transforming comprises: performing a translation on the coordinates of vertices based on differences between maximum and minimum X/Y coordinate values of the vertices. Based on sums of X/Y coordinate values of the new coordinates of the vertices, a canonical form of the geometric elements is determined. The canonical form coordinates of the vertices for a plurality of windows may then be determined. The plurality of windows comprise the window, are centered in the same location as the window, and have different sizes.

主权项

1. A method, executed by at least one processor of a computer, comprising:
transforming coordinates of vertices of geometric elements in a window of a layout design into new coordinates of the vertices, wherein the coordinates of vertices do not comprise clipped coordinates and the transforming comprises:
performing a translation on the coordinates of vertices based on differences between maximum and minimum X coordinate values of the vertices and between maximum and minimum Y coordinate values of the vertices (the clipped coordinate values not considered); and determining canonical form coordinates of the vertices for a plurality of windows based on a sum of X coordinate values of the new coordinates of the vertices and a sum of Y coordinate values of the new coordinates of the vertices, the plurality of windows comprising the window, being centered in the same location as the window, and having different sizes.