| 摘要 |
An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source. |
| 主权项 |
1. An ionization gauge to measure pressure comprising:
an anode structure comprising a mesh grid defining an ionization volume in which electrons impact gas molecules and atoms; an electron source that emits electrons; a first collector electrode to collect ions formed by collisions between the electrons and gas molecules and atoms, to provide a gas pressure output; and a first shade outside of the ionization volume, the first shade being located between the electron source and the first collector electrode, one of the first collector electrode and the electron source being located inside the anode structure, and the other of the first collector electrode and the electron source being located outside the anode structure, electrons from the electron source being directed around the shade into the ionization volume. |
