| 摘要 |
PROBLEM TO BE SOLVED: To anneal an annealed film efficiently in a short time, while suppressing adverse effect due to excessive microwave irradiation.SOLUTION: A microwave heating treatment method includes a first step for heating a workpiece, having an annealed film and a substrate body on which the annealed film is formed, by irradiating with microwaves, and a second step for stopping irradiation with microwaves. Switching from first step to second step is made for a time shorter than the time trequired for the temperature of the substrate body to reach the steady state, preferably shorter than the time trequired for the &Dgr;T to be maximized, after the temperature Tof the annealed film reaches or exceeds the heating target temperature T of the annealed film. |
