| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of improving operability for performing accurate positioning on a large sample stage.SOLUTION: The X-ray analyzer comprises: a sample stage; an X-ray source for irradiating a sample with a primary X-ray; a detector for detecting a secondary x-ray generated from the sample; a position adjustment mechanism for adjusting a relative position between the sample stage and the primary X-ray; an observation mechanism for capturing a sample observation image on the sample stage; a display unit for displaying the sample observation image on an observation screen 9a; and a computer having input means capable of inputting a position on a screen of the display unit with a pointer P, and allowing a drag and drop operation. The computer has a function of moving the sample stage in a movement direction and at a movement speed according to a direction of an arbitrary place outside of a center region A1 with respect to the center region A1 and a distance between the arbitrary place and the center region A1, when the input means performs a drag operation on the pointer P in the center region A1 on the observation screen 9a and moves the pointer P to the arbitrary place outside of the center region A1 in a hold state.</p> |
