PROBE CALIBRATION OR MEASUREMENT ROUTINE

摘要

A method of performing a measurement routine on a probe, the probe comprising a cantilever extending from a support. An interferometer is operated to reflect a sensing beam with the cantilever thereby generating a reflected sensing beam and combine the reflected sensing beam with a reference beam to generate an interferogram. The interferometer generates a first interference measurement value at a first measurement time by measuring the interferogram and a second interference measurement value at a second measurement time by measuring the interferogram, The cantilever deforms to form a different shape between the measurement times. A change in height of the probe between the measurement times is estimated in accordance with a difference between the first and second interference measurement values, and corrected in accordance with the difference in shape of the cantilever between the measurement times.

主权项

1. A method of measuring a probe, the method comprising:
a. arranging the probe in a pair of calibration positions, the probe deforming relative to the support to form a different shape in the pair of calibration positions; b. operating an interferometer to reflect a sensing beam with the probe at each calibration position thereby generating a reflected sensing beam, combine the reflected sensing beam with a reference beam to generate an interferogram, and generate an interference calibration value for each calibration position by measuring the interferogram; c. determining a deformation calibration value which is directly or indirectly indicative of an amount of deformation of the probe between the calibration positions; and d. processing the interference calibration values and the deformation calibration value to generate a correction value.