MEMS

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of inhibiting crosstalk in excitation in an MEMS (MicroElectroMechanical System), where excitation parts and a mass part are coupled via coupling members.SOLUTION: The MEMS includes: a substrate part; excitation parts 6 oscillating in an X direction with respect to the substrate part; and a mass part 10 coupled with the excitation parts 6 via coupling members 14. Each of the coupling members 14 includes a pair of first coupling portions 14a for coupling the excitation part 6 and the mass part 10, and a second coupling portion 14b for coupling between the pair of first coupling portions 14a.