| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a resistance measuring apparatus capable of determining the quality of a probe, and to provide a substrate inspection device, an inspection method, and a maintenance method of a tool for inspection.SOLUTION: A first voltage Vp is acquired, which is measured by voltage probes Pv1 and Pv2, when current probes Pc1 and Pc2 and the voltage probes Pv1 and Pv2 are brought into contact with a conductor pattern M to thereby send a first current Ip into the conductor pattern M by the current probes Pc1 and Pc2. A second voltage Vm is acquired, which is measured by the voltage probes Pv1 and Pv2, when a second current Im in the direction reverse to the first current Ip is sent into the conductor pattern M by the current probes Pc1 and Pc2. A third voltage Vo is acquired, which is measured by the voltage probes Pv1 and Pv2, in the state where current is not sent into the conductor pattern M by the current probes Pc1 and Pc2. Then, the quality related to the probes is determined based on the first voltage Vp, the second voltage Vm and the third voltage Vo.</p> |
