发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an art capable of controlling a deposition position of a silicon nodule.SOLUTION: A semiconductor device 1 comprises a silicon layer 2, a silicon-containing surface side aluminum layer 3 layered in contact with a part of a surface of the silicon layer 2; and an insulation film 5 layered in contact with a part of the surface of the silicon layer and in contact with and adjacent to the surface side aluminum layer 3. When observed from a perpendicular direction with respect to the surface of the silicon layer 2, the insulation film 5 has an insulation film body 10 and a plurality of first nodule deposition parts 11 which project from the insulation film body 10 toward the surface side aluminum layer 3. When observed from the perpendicular direction, a lateral face 20 of the insulation film body 10 and lateral faces 21 of the first nodule deposition parts 1 form corners 31.
申请公布号 JP2015185793(A) 申请公布日期 2015.10.22
申请号 JP20140063289 申请日期 2014.03.26
申请人 TOYOTA CENTRAL R&D LABS INC;TOYOTA MOTOR CORP 发明人 MACHIDA SATORU;YAMASHITA YUSUKE;NISHIKAWA KOICHI;SENOO MASARU;OGAWARA JUN;YASUDA YOSHIFUMI;HOSOKAWA HIROSHI;HIRABAYASHI YASUHIRO
分类号 H01L21/28;H01L21/336;H01L21/768;H01L23/522;H01L29/739;H01L29/78 主分类号 H01L21/28
代理机构 代理人
主权项
地址