发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an art capable of controlling a deposition position of a silicon nodule.SOLUTION: A semiconductor device 1 comprises a silicon layer 2, a silicon-containing surface side aluminum layer 3 layered in contact with a part of a surface of the silicon layer 2; and an insulation film 5 layered in contact with a part of the surface of the silicon layer and in contact with and adjacent to the surface side aluminum layer 3. When observed from a perpendicular direction with respect to the surface of the silicon layer 2, the insulation film 5 has an insulation film body 10 and a plurality of first nodule deposition parts 11 which project from the insulation film body 10 toward the surface side aluminum layer 3. When observed from the perpendicular direction, a lateral face 20 of the insulation film body 10 and lateral faces 21 of the first nodule deposition parts 1 form corners 31. |
申请公布号 |
JP2015185793(A) |
申请公布日期 |
2015.10.22 |
申请号 |
JP20140063289 |
申请日期 |
2014.03.26 |
申请人 |
TOYOTA CENTRAL R&D LABS INC;TOYOTA MOTOR CORP |
发明人 |
MACHIDA SATORU;YAMASHITA YUSUKE;NISHIKAWA KOICHI;SENOO MASARU;OGAWARA JUN;YASUDA YOSHIFUMI;HOSOKAWA HIROSHI;HIRABAYASHI YASUHIRO |
分类号 |
H01L21/28;H01L21/336;H01L21/768;H01L23/522;H01L29/739;H01L29/78 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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