发明名称 |
FORCE DETECTION DEVICE, ROBOT, ELECTRONIC COMPONENT CONVEYANCE DEVICE, AND ELECTRONIC COMPONENT DETECTION DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a force detection device capable of effectively reducing the generation of a temperature drift by reducing heat conduction, a robot, an electronic component conveyance device, and an electronic component detection device.SOLUTION: A force detection device 1 comprises: a first base 2; a second base 3 which is arranged facing the first base 2; an electric charge output element (piezoelectric element) 10 which is provided between the first base 2 and the second base 3 and outputs a signal according to external force; an analog circuit board 4 which is provided between the first base 2 and the second base 3 and to which a signal output from the electric charge output element 10 is input; a pressurization bolt (first member) 71 which fixes the first base 2 and the second base 3 and has a male screw (columnar portion) 72; and a heat insulating member (second member) 8 which is provided outside the male screw 72 and has a lower thermal conductivity than that of the pressurization bolt 71.</p> |
申请公布号 |
JP2015184007(A) |
申请公布日期 |
2015.10.22 |
申请号 |
JP20140057665 |
申请日期 |
2014.03.20 |
申请人 |
SEIKO EPSON CORP |
发明人 |
KAWAI HIROKI;ARAKAWA YUTAKA;MATSUMOTO TAKANOBU |
分类号 |
G01L1/16;G01L5/16 |
主分类号 |
G01L1/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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