PRECISION TRENCH CAPACITOR

摘要

A capacitor structure can include a parallel connection of a plurality of trench capacitors. First nodes of the plurality of trench capacitors are electrically tied to provide a first node of the capacitor structure. Second nodes of the plurality of trench capacitors are electrically tied together through at least one programmable electrical connection at a second node of the capacitor structure. Each programmable electrical connection can include at least one of a programmable electrical fuse and a field effect transistor, and can disconnect a corresponding trench capacitor temporarily or permanently. The total capacitance of the capacitor structure can be tuned by programming, temporarily or permanently, the at least one programmable electrical connection.

主权项

1. A capacitor structure comprising:
a set of serially connected devices including an inner electrode of a trench capacitor located in a semiconductor substrate and a programmable electrical switching device located on said semiconductor substrate, wherein said programmable electrical switching device is electrically shorted to a first node of said capacitor structure; and at least another trench capacitor located in said semiconductor substrate, wherein an inner electrode of each of said at least another trench capacitor is electrically shorted to said first node of said capacitor structure,wherein an outer electrode of said trench capacitor and an outer electrode of each of said at least another trench capacitor are electrically shorted to a second node of said capacitor structure.