MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

A stage device is equipped with a surface plate and a wafer stage which is mounted on the surface plate and has an exhausting port formed on a surface facing the surface plate. In a state where the wafer stage lands on the surface plate, an air chamber is formed in between the surface plate and the wafer stage. Pressurized gas blows out from the exhausting port provided at a stage main section into the air chamber, and self-weight of the wafer stage is cancelled by an inner pressure of the air chamber. This allows to the wafer stage which has stopped on the surface plate to be moved manually.

主权项

1. A movable body apparatus, comprising:
a base member; a movable body placed on the base member that is movable two-dimensionally on the base member; and a planar motor of a magnetic levitation method which drives the movable body on the base member, the motor having a stator provided at the base member and a mover provided at the movable body, wherein the movable body has a movable body main section, a frame-shaped member having a lower surface facing the base member of the movable body main section in which a surface provided at the periphery of the mover facing the base member is flush with other portions including the mover or protrudes to a side of the base member than the other portions, and an exhausting port which is provided at the movable body main section that blows out pressurized gas supplied from the outside toward the base member.