SUPPORT DEVICE AND SUPPORT METHOD OF PLANAR MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a support device of a planar member capable of supporting a planar member having a warp, while bringing the supported surface of a planar member into tight contact with the support surface, even with a weak suction force.SOLUTION: A support device 10 of a planar member WF includes support means 20 having a support surface 26 for supporting the planar member WF, pressure reduction means 40 for giving a suction force from the support surface 26 to the supported surface WF1 of the planar member WF, and energization means 50 provided so as to be able to project and retract from the support surface 26 side on the outside of the planar member WF supported by the support surface 26, and energizing the planar member WF from the open surface WF2 side, on the opposite side of the supported surface WF1, toward the support surface 26 side.