SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To eliminate the waiting time during transportation of a substrate holder to improve the throughput of substrate processing.SOLUTION: A substrate processing apparatus includes: a transportation machine equipped with a holding part for holding a substrate holder and a transportation part for transporting the substrate holder held in a holding part; and a processing tank in which a substrate retained in the substrate holder is housed so that an in-plane direction of the substrate is directed in the vertical direction and which is used for processing the substrate. The holding part is constituted so as to hold the substrate holder in a state where the in-plane direction of the substrate is directed in the horizontal direction. The transportation part is constituted so as to transport the substrate holder over the processing tank in a state where the in-plane direction of the substrate is directed in the horizontal direction.