AMORPHOUS CARBON AND ALUMINUM X-RAY WINDOW

摘要

The invention is an x-ray window with a stack of thin film layers including aluminum layer(s), corrosion-barrier layer(s), and/or polymer layer(s). Aluminum layer(s) can provide improved gas impermeability. Polymer layer(s) can increase structural strength. The x-ray window can be substantially transmissive to x-rays but also substantially block visible light and infrared light. The x-ray window can have minimal deflection.

主权项

1. An x-ray window comprising:
a. a stack of thin film layers including a first aluminum layer, a second aluminum layer, a polyimide layer, and a corrosion-barrier layer; b. the corrosion-barrier layer comprises a material selected from the list consisting of amorphous carbon or hexamethyldisilazane; c. an order of the stack of thin film layers is the corrosion-barrier layer, the first aluminum layer, the polyimide layer, then the second aluminum layer; d. an enclosure having a hollow center and an opening; e. the stack of thin film layers is hermetically sealed to the opening of the enclosure; f. the corrosion-barrier layer is disposed as the farthest layer away from the hollow center; g. the stack of thin film layers having:
i. a transmissivity of greater than 60% for x-rays having an energy of 1.74 keV;ii. a transmissivity of less than 10% for visible light at a wavelength of 550 nanometers; andiii. a transmissivity of less than 10% for infrared light at a wavelength of 800 nanometers.